Linear Stage
CXC80 - Ultra Precision
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Guidance System: Linear Ball Guide (Gothic Arch) Features a Gothic Arch groove design on both upper and lower rail surfaces. This specialized dual-arc geometry creates a robust four-point contact architecture, significantly enhancing structural rigidity and multi-directional load capacity.
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Transmission: Precision Ball Screw Utilizes high-efficiency rolling contact between the ball nut and screw to ensure superior positioning accuracy and an extended service life. It is engineered for high-speed bidirectional transmission and responsive motion reversal.
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Material: Stainless Steel
- Specifications
- Technical Data
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Total of 1 models
| Model | CXC80 |
|---|---|
| Inquiry | Add To Inquiry |
| Table Size (mm) | 80*80 |
| Travel stroke (30mm) _ Drive Type | Ø8 ball screw, 1mm lead |
| Travel distance (30mm) _ rail | Linear ball recirculating |
| Travel distance (30mm) - Stage Material | Stainless steel |
| Travel distance (30mm) - Surface Treatment | Electroless nickel plating |
| Travel distance (30mm) _ Accuracy grade | OP：Ultra Precision |
| Travel (30mm) _ Cable direction | N: Generally qualifying |
| Travel Stroke (30mm) _ Resolution(Pulse) (µm) | M: 1 (Full); 0.5 (Half) |
| Travel Stroke (30mm) _ Resolution(Pulse) (µm) | J: 2 (Full); 1 (Half) |
| Travel distance (30mm) _ Maximum speed (full step) (mm/sec) | 15 |
| Travel distance (30mm) _ Unidirectional positioning accuracy (µm) | 5 |
| Travel distance (30mm) _ Repeatability Precision(µm) | ±0.5 |
| Travel distance (30mm) _ Multi-point repeated positioning accuracy (µm) | A: 1.5 / B: 1 |
| Travel distance (30mm) _ Load Capacity (Kgf) | 16 |
| Travel distance (30mm) _ Missed Step (µm) | 1 |
| Travel (30mm) _ Torque Rigidity | Pitch: 0.05 / Yaw: 0.05 / Rolling: 0.05 ("/N-cm) |
| Travel (30mm) - Pitch/Yaw | Pitch: < 20" / Yaw: < 15" |
| Travel distance (30mm) _ Parallelism (µm) | 20 |
| Travel distance (30mm) _ Dynamic Straightness (µm) | 2 |
| Travel distance (30mm) _ Dynamic Parallelism (µm) | 10 |
| Travel stroke (30mm) _ Motor _ Type / Output shaft type | M: 5-phase stepper high-resolution motor / ☐28 double shafts |
| Travel stroke (30mm) _ Motor _ Type / Output shaft type | J: 5-phase stepper motor / ☐28 double shafts |
| Travel distance (30mm) _ Motor _ Brand/Model | M: Orientalmotor / PKP523MN07B |
| Travel distance (30mm) _ Motor _ Brand/Model | J: Orientalmotor / PKP523N12B |
| Travel distance (30mm) - Driver Brand/Model | Orientalmotor / CVD Series - 5 Phase stepping motor (Additional options) |
| Travel Stroke (30mm) - Connector - Stage Side Connector | 15-pin male connector D-SUB |
| Travel Stroke (30mm) - Connector - Stage Side Connector | 12-pin male connector HRS |
| Travel Stroke (30mm) _ Connector _ Controller Side Connector | 15-pin female connector D-SUB (sold separately) |
| Travel Stroke (30mm) _ Connector _ Controller Side Connector | 12-pin female connector HRS (sold separately) |
| Travel distance (30mm)_Sensor_Travel origin sensor | GMT sensor |
| Travel distance (30mm)_Sensor_Limit Sensor | GMT sensor |
| Travel distance (30mm)_Sensor_Motor proximity sensor | N / A |
| Travel distance (30mm)_Sensor_Power Voltage | 24V±10% |
| Travel distance (30mm)_Sensor_Control Output | NPN open collector output under 24V 8mA |
| Travel distance (30mm)_Sensor_Output Control | Testing (sensing)：output transistor OFF (closed) |
| Travel distance (50mm) _ Drive Type | Ø8 ball screw, 1mm lead |
| Travel distance (50mm) _ rail | Linear ball recirculating |
| Travel distance (50mm) - Stage Material | Stainless steel |
| Travel distance (50mm) - Surface Treatment | Electroless nickel plating |
| Travel distance (50mm) _ Accuracy grade | OP：Ultra Precision |
| Travel distance (50mm) - Cable direction | N: Generally qualifying |
| Travel Stroke (50mm) _ Resolution (pulse) (µm) | M: 1 (Full); 0.5 (Half) |
| Travel Stroke (50mm) _ Resolution (pulse) (µm) | J: 2 (Full); 1 (Half) |
| Travel distance (50mm) _ Maximum speed (full step) (mm/sec) | 15 |
| Travel distance (50mm) _ Unidirectional positioning accuracy (µm) | 5 |
| Travel distance (50mm) _ Repeatability Precision(µm) | ±0.5 |
| Travel distance (50mm) _ Multi-point repeated positioning accuracy (µm) | A: 1.5 / B: 1 |
| Travel distance (50mm) _ Load Capacity (Kgf) | 16 |
| Travel distance (50mm) _ Missed Step (µm) | 1 |
| Travel (50mm) _ Moment Stiffness | Pitch: 0.05 / Yaw: 0.05 / Rolling: 0.05 ("/N-cm) |
| Travel (50mm) - Pitch/Yaw | Pitch: < 20" / Yaw: < 15" |
| Travel distance (50mm) _ Parallelism (µm) | 20 |
| Travel distance (50mm) _ Dynamic Straightness (µm) | 2 |
| Travel distance (50mm) _ Dynamic Parallelism (µm) | 10 |
| Travel stroke (50mm) _ Motor _ Type / Output shaft type | M: 5-phase stepper high-resolution motor / ☐28 double shafts |
| Travel stroke (50mm) _ Motor _ Type / Output shaft type | J: 5-phase stepper motor / ☐28 double shafts |
| Travel distance (50mm) _ Motor _ Brand/Model | M: Orientalmotor / PKP523MN07B |
| Travel distance (50mm) _ Motor _ Brand/Model | J: Orientalmotor / PKP523N12B |
| Travel distance (50mm) - Driver Brand/Model | Orientalmotor / CVD Series - 5 Phase stepping motor (Additional options) |
| Travel Stroke (50mm) - Connector - Stage Side Connector | 15-pin male connector D-SUB |
| Travel Stroke (50mm) - Connector - Stage Side Connector | 12-pin male connector HRS |
| Travel Stroke (50mm) _ Connector _ Controller Side Connector | 15-pin female connector D-SUB (sold separately) |
| Travel Stroke (50mm) _ Connector _ Controller Side Connector | 12-pin female connector HRS (sold separately) |
| Travel distance (50mm)_Sensor_Travel origin sensor | GMT sensor |
| Travel distance (50mm)_Sensor_Limit Sensor | GMT sensor |
| Travel distance (50mm)_Sensor_Motor proximity sensor | N / A |
| Travel distance (50mm)_Sensor_Power Voltage | 24V±10% |
| Travel distance (50mm)_Sensor_Control Output | NPN open collector output under 24V 8mA |
| Travel distance (50mm)_Sensor_Output Control | Testing (sensing)：output transistor OFF (closed) |
| Travel stroke (75mm) _ Drive Type | Ø8 ball screw, 2mm lead |
| Travel distance (75mm) _ rail | Linear ball recirculating |
| Travel distance (75mm) _ Stage Material | Stainless steel |
| Travel distance (75mm) - Surface Treatment | Electroless nickel plating |
| Travel distance (75mm) _ Accuracy grade | OP：Ultra Precision |
| Travel (75mm) _ Cable Outgoing Direction | N: Generally qualifying |
| Travel distance (75mm) _ Resolution (pulse) (µm) | M: 2 (Full); 1 (Half) |
| Travel distance (75mm) _ Resolution (pulse) (µm) | J: 4 (Full); 2 (Half) |
| Travel distance (75mm) _ Maximum speed (full step) (mm/sec) | 30 |
| Travel distance (75mm) _ Unidirectional positioning accuracy (µm) | 7 |
| Travel distance (75mm) _ Repeatability Precision(µm) | ±0.5 |
| Travel distance (75mm) _ Multi-point repetitive positioning accuracy (µm) | A: 1.5 / B: 1 |
| Travel distance (75mm) _ Load Capacity (Kgf) | 16 |
| Travel distance (75mm) _ Missed Step (µm) | 1 |
| Travel (75mm) _ Moment Stiffness | Pitch: 0.05 / Yaw: 0.05 / Rolling: 0.05 ("/N-cm) |
| Travel (75mm) - Pitch/Yaw | Pitch: < 20" / Yaw: < 15" |
| Travel distance (75mm) _ Parallelism (µm) | 20 |
| Travel distance (75mm) _ Dynamic Straightness (µm) | 2 |
| Travel distance (75mm) _ Dynamic Parallelism (µm) | 10 |
| Travel stroke (75mm) _ Motor _ Type / Output shaft type | M: 5-phase stepper high-resolution motor / ☐28 double shafts |
| Travel stroke (75mm) _ Motor _ Type / Output shaft type | J: 5-phase stepper motor / ☐28 double shafts |
| Travel Stroke (75mm) _ Motor _ Brand/Model | M: Orientalmotor / PKP523MN07B |
| Travel Stroke (75mm) _ Motor _ Brand/Model | J: Orientalmotor / PKP523N12B |
| Travel distance (75mm)_Driver Brand/Model | Orientalmotor / CVD Series - 5 Phase stepping motor (Additional options) |
| Travel Stroke (75mm) - Connector - Stage Side Connector | 15-pin male connector D-SUB |
| Travel Stroke (75mm) - Connector - Stage Side Connector | 12-pin male connector HRS |
| Travel Stroke (75mm) _ Connector _ Controller Side Connector | 15-pin female connector D-SUB (sold separately) |
| Travel Stroke (75mm) _ Connector _ Controller Side Connector | 12-pin female connector HRS (sold separately) |
| Travel distance (75mm)_Sensor_Travel origin sensor | GMT sensor |
| Travel Stroke (75mm)_Sensor_Limit Sensor | GMT sensor |
| Travel distance (75mm)_Sensor_Motor proximity sensor | N / A |
| Travel distance (75mm)_Sensor_Power Voltage | 24V±10% |
| Travel distance (75mm)_Sensor_Control Output | NPN open collector output under 24V 8mA |
| Travel distance (75mm)_Sensor_Output Control | Testing (sensing)：output transistor OFF (closed) |
| Travel Stroke (100mm) _ Drive Type | Ø8 ball screw, 2mm lead |
| Travel distance (100mm) _ Track | Linear ball recirculating |
| Travel distance (100mm) _ Stage Material | Stainless steel |
| Travel distance (100mm) - Surface Treatment | Electroless nickel plating |
| Travel distance (100mm) _ Accuracy class | OP：Ultra Precision |
| Travel distance (100mm) _ Cable direction | N: Generally qualifying |
| Travel distance (100mm) _ Resolution (pulse) (µm) | M: 2 (Full); 1 (Half) |
| Travel distance (100mm) _ Resolution (pulse) (µm) | J: 4 (Full); 2 (Half) |
| Travel distance (100mm) _ Maximum speed (full-speed) (mm/sec) | 30 |
| Travel distance (100mm) - Unidirectional positioning accuracy (µm) | 10 |
| Travel distance (100mm) _ Repeatability Precision(µm) | ±0.5 |
| Travel distance (100mm) - Multi-point repetitive positioning accuracy (µm) | A: 1.5 / B: 1 |
| Travel distance (100mm) _ Load Capacity (Kgf) | 16 |
| Travel distance (100mm) _ Missed Step (µm) | 1 |
| Travel (100mm) _ Moment Stiffness | Pitch: 0.05 / Yaw: 0.05 / Rolling: 0.05 ("/N-cm) |
| Travel (100mm) - Pitch/Yaw | Pitch: < 20" / Yaw: < 15" |
| Travel distance (100mm) _ Parallelism (µm) | 20 |
| Travel distance (100mm) _ Dynamic Straightness (µm) | 4 |
| Travel distance (100mm) _ Dynamic Parallelism (µm) | 10 |
| Travel stroke (100mm) _ Motor _ Type / Output shaft type | M: 5-phase stepper high-resolution motor / ☐28 double shafts |
| Travel stroke (100mm) _ Motor _ Type / Output shaft type | J: 5-phase stepper motor / ☐28 double shafts |
| Travel distance (100mm) _ Motor _ Brand/Model | M: Orientalmotor / PKP523MN07B |
| Travel distance (100mm) _ Motor _ Brand/Model | J: Orientalmotor / PKP523N12B |
| Travel distance (100mm)_Driver Brand/Model | Orientalmotor / CVD Series - 5 Phase stepping motor (Additional options) |
| Travel Stroke (100mm) - Connector - Stage Side Connector | 15-pin male connector D-SUB |
| Travel Stroke (100mm) - Connector - Stage Side Connector | 12-pin male connector HRS |
| Travel Stroke (100mm) _ Connector _ Controller Side Connector | 15-pin female connector D-SUB (sold separately) |
| Travel Stroke (100mm) _ Connector _ Controller Side Connector | 12-pin female connector HRS (sold separately) |
| Travel distance (100mm)_Sensor_Travel origin sensor | GMT sensor |
| Travel Stroke (100mm)_Sensor_Limit Sensor | GMT sensor |
| Travel distance (100mm)_Sensor_Motor proximity origin sensor | N / A |
| Travel distance (100mm)_Sensor_Power Voltage | 24V±10% |
| Travel distance (100mm)_Sensor_Control Output | NPN open collector output under 24V 8mA |
| Travel distance (100mm)_Sensor_Output Control | Testing (sensing)：output transistor OFF (closed) |
Product Overview
Multi-point repeated positioning accuracy
♦ Accuracy measurement description
1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual the difference between the movement value and the target movement value, and the maximum error value is taken. This value is the unidirectional positioning accuracy.
2. Multi-point repeated positioning accuracy: within the range of the predetermined detection stroke, when the mechanical program is executed, the position accuracy obtained by repeatedly running the same program code degree. Calculate the position deviation that occurs when the same position is repeated back and forth, and obtain the deviation value between the two.
♦ Precision introduction
1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process.
2. The detection of GMT high-end precision linear slide module series adopts multi-point repeated measurement, that is, multi-point quantity measurement within a fixed stroke range (points the amount is increased or decreased according to the length of the stroke), and the actual change of the round-trip position error is recorded, in pursuit of high precision and repeatability.
3. Through the non-contact laser interferometer measurement, to ensure that the unidirectional positioning is within 10μm, and the multipoint repetitive positioning accuracy is within 1.5μm. If there is a need for higher precision and precision, please contact the regional sales/business team.
System Configuration Diagram
♦ For detailed specifications, please read the description for the stage and connecting cable.
♦ For selection of driver, please refer to the cross-reference table for the motor/driver of the standard motorized stage or the GMT motor and driver catalog.
♦ The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs.
Axis Definition
GMT has defined different axis as the following figuration according to the movement direction:
Horizontal movement direction is X and Y axis.
Vertical movement direction is Z axis.
Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis.
Green arrows present the specified axis movement direction.
Motor/driver
Electrical specifications
Stepper Motor/Driver Specifications Comparison Table
Electric slide table and connecting cable
Introduction to Electromagnetic Brake Stepper Motors
Introduction to Feedback Stepper Motors
Linear sliding table detection method (X, Y axis)
Model
CXC8030-S2OP
CXC8050-S2OP
CXC8075-S2OP
CXC80100-S2OP
