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Module
All Multi-axis precision coupled electric stage 12-axis manual fiber-coupled stage module 12 Axis Automatice Aligement System High-Precision Hexapod Platform

OC02-XYZ-A6E-6020

OC02-XYZ-A6E-6020
‧ Communication Protocols：EtherCAT
‧ Loop：XYZ Close Loop
‧ This product pic. shows as A6E-6020-L-MH
  • Specifications
  • Technical Data
  • Image Download
Product Overview

Updated: March 6, 2026

Product model  

OC02-XYZ-A6E-6020-R-MH-ET (6 Axis Module-Right side)
OC02-XYZ-A6E-6020-L-MH-ET
 (6 Axis Module-Left side)
OC02-XYZ-A6E-6020-MH-ET (12 Axis Module)

 

Specification Sheet 

 Axis

X

Y

Z

θx

θy

θz
Travel Stroke 30mm 10mm 30mm ±5° ±8.2° ±6°
Ball Screw Lead 1mm 1mm 1mm 1mm 1mm 1mm
Material Stainless Steel Stainless Steel Stainless Steel Aluminum Alloy Aluminum Alloy Aluminum Alloy
Surface Treatment Nickel Plating Nickel Plating Nickel Plating Black Anodized Black Anodized Black Anodized
Resolution(Pulse) (µm) 1μm(Full) / 
0.5μm(Half)		 0.5μm(Full) / 
0.25μm(Half)		 1μm(Full) / 
0.5μm(Half)		 0.00055°(Full) / 
0.000275°(Half)		 0.00125°(Full) / 
0.000625°μm(Half)		 0.00071°(Full) / 
0.000355°(Half)
Positioning Presion 5μm 5μm 5μm 0.02° 0.02° 0.02°
Repeatability Precision ±0.3μm ±0.5μm ±0.3μm ±0.002° ±0.002° ±0.002°
Missed Step 0.5μm 1μm 0.5μm <0.002° <0.003° <0.002°
Electrical Motor PKP544MN18B PKP523MN07B PKP544MN18B PKP523MN07B PKP523MN07B PKP523MN07B
Drive STP-K5231A (3-Axis Integrated Driver) STP-K5231A (3-Axis Integrated Driver)
Loop Close Loop Open Loop
Encoder Specification Renishaw  ATOM series   Resolution：0.02μm N/A
Repeatability Precision with
Encoder Correction		 ±0.1μm ±0.2μm ±0.1μm N/A
Communication Protocols
 EtherCAT EtherCAT