Solutions for the Semiconductor and Optical Communications Industries
Tx FAU Bonder (Passive Bonding)
Function
- High-Definition CCD Recognition
- Fixed the FAU after Coupling by UV Glue
- High-Precision Vision CCD to Align X/Y/Z Plane
- Online Monitoring and Data Uploading to Database
- Specifications
- Technical Data
- Image Download
Product Overview
Updated: April 8, 2025
Product illustration
Station details
|
Station |
Function |
Key Point |
| Tx FAU Bonding |
‧High-Definition CCD Recognition ‧Fixed the FAU after Coupling by UV Glue |
‧High-Precision Vision CCD to Align X/Y/Z Plane ‧Online Monitoring and Data Uploading to Database |
Major equipment
|
Equipment |
Key Parameter |
| Bonding Machine |
‧X/Y/Z Resolution：10nm ‧Bonding force：5gF ‧Cycle Time：< 130 sec/pcs (No cover UVtime) |
Specification Sheet
|
Type |
Item |
Parameter |
| Facility Requirement & Appearance |
Power Input | 220V 50/60 Hz |
| Pneumatic System | Compressed air flow >2LPM；System supply pressure 0.6MPa-0.7MPa | |
| Vacuum System | Vacuum gauge reading ≤ -80kPa | |
| Environmental Conditions | Temperature：15-35°C；Humidity: standard 70% at 32°C；Cleanliness level：100k Class |
|
| Machine Dimensions | 1000mm*1200mm*1800mm | |
| Equipment Weight | 850-950 kg | |
| Safety Protection | Product security defense | Contact grounding treatment |
| ESD protection | Ion fan for electrostatic removal | |
| Software protection | Mistake proofing | |
| Equipment protection | Collision prevention, axis stroke limit, distance sensor | |
| Operator safety protection | Protective goggles | |
| Loading/ Unloading Module |
PCB Tray (5pcs, customizable) | Linear module + servo motor |
| FA Tray (5pcs, customizable) | Linear module + servo motor | |
| Dispensing Module | Structure Configuration | Three-axis：XY axis linear step motor + Z axis servo motor + ball screw module(supporting dots and lines); Positioning accuracy：5μm |
| Dispensing system | Musashi high-precision dispensing machine, single-point (needle), Standard 3mL capacity, other volumes customizable |
|
| UV Curing System | Configuration and Parameters | Dual LED light source, pneumatic shutter, wavelength 365nm |
Bonding system |
Clamping | Electric gripper and vacuum suction |
| Gantry System | 4 axis：XY linear step motor, Z servo motor with ball screw, θ arc swing: 0.5um repeat positioning accuracy |
|
| Visual System | Automatic alignment；500M CCD；field of view：10.6 × 8.9mm; resolution ：2.7μm；depth of field：1.6mm |
|
| Bonding Force Control | Pressure sensor monitoring：5gF |
