Solutions for the Semiconductor and Optical Communications Industries
Rx FAU Aligner
Function
- RX FA Coupling
- RX FA Align with PD
- Fixed the FA after Coupling by UV Glue (Include Glue Fixed and UV Curing)
- RSSI ADC
- High-Precision Stage to Align X/Y/Z Plane
- Online Monitoring and Data Uploading to Database
- Specifications
- Technical Data
- Image Download
Product Overview
Updated: April 8, 2025
Product illustration
Station details
|
Station |
Function |
Key Point |
| FA Coupling |
‧RX FA Coupling ‧RX FA Align with PD ‧Fixed the FA after Coupling by UV Glue (Include Glue Fixed and UV Curing) |
‧RSSI ADC ‧High-Precision Stage to Align X/Y/Z Plane ‧Online Monitoring and Data Uploading to Database |
Major equipment
|
Equipment |
Key Parameter |
| Coupling Machine | ‧X/Y/Z Resolution：10nm ‧X/Y/Z Repeatability Accuracy：±50nm |
Specification Sheet
|
Type |
Item |
Parameter |
| Equipment Dimensions & Power |
Power Input | 220V 50/60 Hz |
| Pneumatic System | Compressed air flow >2LPM；System supply pressure 0.6MPa-0.7MPa | |
| Vacuum System | Vacuum gauge reading ≤ -80kPa | |
| Environmental Conditions | Temperature：15-35°C；Humidity：standard 70% at 32°C；Cleanliness level：100k Class | |
| Machine Dimensions | 1150mm*1200mm*1850mm | |
| Equipment Weight | 850-950 kg | |
| Safety Protection | Product security defense | Contact grounding treatment |
| ESD protection | Ion fan for electrostatic removal | |
| Software protection | Mistake proofing | |
| Equipment protection | Collision prevention, axis stroke limit, distance sensor | |
| Operator safety protection | Protective goggles | |
| Alignment Module | Operating module | 6-axis module |
| Workpiece Clamping | Electric clamp, vacuum suction fixation | |
| Single-Axis Repeatability XYZ Drive Mechanism |
±0.05μm Step motor with ball screw |
|
| θx | Manual adjustment | |
| High-Precision Alignment Stage θy/θz |
Automatic stage Repeatability：±0.001° | |
| Dispensing Module | Structural Type | Pneumatic extension dispensing supply (XY manual stage position fixation) |
| Dispensing Method | Bottom-side dispensing | |
| Dispensing system | Musashi high-precision dispensing machine, single-point (needle), Standard 3mL capacity, other volumes customizable |
|
| Device Biasing Method | Socket connection | Automatic alignment |
| Loading/ Unloading Module |
FA Tray | Single MPO dual FA |
| PCB Tray | Single PCB tray with Pneumatic clamping | |
| UV Curing System | UV type | HOYA dual LED light source；Wavelength 365nm |
| Operate axis | XYZ axis with air powered cylinder | |
| Visual System | Number of cameras | 2 |
| Visual recognize | Automatic alignment；5 Megapixel CCD；Visual range 5.6×4.7mm；Resolution：1.4 μm；Depth of field：0.3mm | |
| Camera axis | XYZ 3 axis：step motor with ball screws | |
| Alignment System | Alignment stability (Average Variance value) |
<±5% |
| Level adjustment | Automatic alignment module | |
| High adjustment | Pressure sensing | |
| CT | < 180 sec/channel (Not including curing time, Depending on application scenario) | |
Software |
Programming language | LabVIEW |
| Data binding | Capable to record production orders, product codes | |
| Storage | Production data can be saved | |
| Program calls | Program base can save multiple alignment programs to fit different alignment process | |
| Power Meter |
Meter type | Keysight E3646A(Can be modified according to requirements) |
| Voltage/Current range | Keysight (0-8V,3A/0-20V,1.5A) | |
| Measure resolution | Voltage：<0.05% +5mV / Electric current <0.15% + 5mA | |
| Laser Source |
Laser type | Santec(TSL-570A-P) (Can be modified according to requirements) |
| Performance | 200 nm/s quick scan High precision range(± 2 pm) & resolution(0.1 pm) The sealed cavity ensures the stability of each wavelength Multiple wavelength options from 1240 to 1680 nm Adjust scan range 10GHz |
|
| Laser Power Meter |
Type | Santec MPM-220 series (Can be modified according to requirements) |
| Sensor performance | 840 - 1700 nm ，-80 - +8 dBm customize option |
