XYZT four-axis motion module

A dedicated solution designed for semiconductor wafer processing and inspection.

It uses a direct drive motor as the direct power source, and is paired with a high-rigidity cross roller guide.

This enables the module to have nanometer-level steady-state error and high-speed motion capability.

The modular design allows for flexible and diverse configurations based on customer needs.

Widely used in fields such as optical communication, semiconductor precision testing, vision inspection, and micro-engineering, providing customers with solutions for high-precision moving parts.

Specifications
Technical Data
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Total of 2 models

Model	GNTXYZT-200-200-5-30-0000	GNTXYZT-300-300-10-360-0000
Inquiry	Add To Inquiry	Add To Inquiry
XY axis_load	5 kg	8 kg
XY axis travel	200 x 200 mm	300 x 300 mm
XY axis positioning accuracy/rotation accuracy	± 0.35 µm	± 0.55 µm
XY axis repeatability	± 0.2 µm	± 0.2 µm
XY axis - Single axis straightness	± 1.5 µm	± 2.5 µm
XY axis flatness	± 1.5 µm	± 2.5 µm
XY axis orthogonality	15 arc-sec	15 arc-sec
XY axis - continuous thrust/continuous torque	48.8 N	163.6 N
XY axis - Instantaneous thrust/Instantaneous torque	340 N	1013.2 N
XY axis - maximum speed	800 mm/s	800 mm/s
XY axis - maximum acceleration	1 g	1.5 g
XY axis - continuous current	4.4 Arms	6.24 Arms
XY axis_instantaneous current	30.7 Arms	38.6 Arms
XY axis resistance	2.6 ohms	2.4 ohm
XY axis_inductance	0.35 H	0.665 H
XY axis_module weight	35 kg	83 kg
XY axis - Optical scale category	Increment, analogy	Increment, analogy
Z-axis_load	5 kg	8 kg
Z-axis travel	5 mm	10 mm
Z-axis positioning accuracy/rotation accuracy	± 0.25 µm	± 0.35 µm
Z-axis repeatability	± 0.15 µm	± 0.2 µm
Z-axis - Single-axis straightness	± 1 µm	± 2.5 µm
Z-axis flatness	± 1.5 µm	--
Z-axis Orthogonality	--	--
Z-axis - Continuous Thrust/Continuous Torque	24.4 N	23 N
Z-axis - Instantaneous thrust/Instantaneous torque	170 N	170 N
Z-axis - Maximum speed	75 mm/s	5 mm/s
Z-axis - Maximum acceleration	0.7 g	0.7 g
Z-axis - Continuous Current	2.2 Arms	2.2 Arms
Z-axis_instantaneous current	15.351 Arms	15.351 Arms
Z-axis resistance	5.2 ohms	5.2 ohms
Z-axis inductance	0.7 mH	0.7 mH
Z-axis - Module weight	35 kg	83 kg
Z-axis - Optical scale category	Increment, analogy	Increment, analogy
T-axis_load	5 kg	8 kg
T-axis travel	± 15°	360°
T-axis positioning accuracy/angle accuracy	± 2.5 arc-sec	± 2.5 arc-sec
T-axis repeatability	± 1.5 arc-sec	± 1.5 arc-sec
T-axis - Single-axis straightness	--	--
T-axis flatness	--	--
T-axis Orthogonality	--	--
T-axis - Continuous Thrust/Continuous Torque	3 N	10 N
T-axis - Instantaneous thrust/Instantaneous torque	10 N	30 N
T-axis - Maximum speed	2400°/s	2400°/s
T-axis - Maximum acceleration	2400°/s^2	2400°/s^2
T-axis - Continuous Current	2.3 Arms	3 Arms
T-axis - Instantaneous Current	6.5 Arms	18 Arms
T-axis resistance	4.4 ohm	5 ohm
T-axis_Inductance	5.8 mH	10.5 mH
T-axis - Module weight	35 kg	83 kg
T-axis - Optical ruler category	Increment, analogy	Increment, analogy

Model

GNTXYZT-200-200-5-30-0000

GNTXYZT-300-300-10-360-0000