XYZ three-axis motion module

It uses a modular stacking method to combine components, allowing for various configurations to be made according to customer needs.

The direct-drive module, equipped with high-rigidity guide rails and high-performance drivers, can achieve repeatability and positioning accuracy at the nanometer level.

It can be widely used in fiber optic coupling, precision testing, semiconductor testing, IC packaging equipment, object measurement, micro-engineering and other fields.

Specifications
Technical Data
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Total of 2 models

Model	GNTXYZ-100-100-60	GNTXYZ-160-160-60
Inquiry	Add To Inquiry	Add To Inquiry
X-axis_load	Y+Z+10 kg	Y+Z+10 kg
X-axis travel	100 mm	160 mm
X-axis positioning accuracy/rotation accuracy	± 0.3 µm	± 0.3 µm
X-axis_Repeatability	± 0.15 µm	± 0.15 µm
X-axis_XY orthogonal	15 are-sec	15 are-sec
X-axis and YZ orthogonal	--	--
X-axis - Continuous Thrust	26.7 N	26.7 N
X-axis - Instantaneous Thrust	133.4 N	133.4 N
X-axis - Continuous Current	1.6 Arms	1.6 Arms
X-axis - Instantaneous Current	8 Arms	8 Arms
X-axis linear resistance	8.3 ohms	8.3 ohms
X-axis linear inductance	1.8 mH	1.8 mH
X-axis - Electrical Time Constant	0.21ms	0.21ms
X-axis - Back EMF constant	13.9 V/(m/s)	13.9 V/(m/s)
X-axis - Optical ruler category	Increment, analogy (20 nm)	Increment, analogy (20 nm)
Y-axis_load	Z+10 kg	Z+10 kg
Y-axis travel	100 mm	160 mm
Y-axis positioning accuracy/rotation accuracy	± 0.3 µm	± 0.3 µm
Y-axis_Repeatability	± 0.15 µm	± 0.15 µm
Y-axis_XY orthogonal	15 are-sec	15 are-sec
Y-axis_YZ orthogonal	15 are-sec	15 are-sec
Y-axis - Continuous Thrust	26.7 N	26.7 N
Y-axis - Instantaneous Thrust	133.4 N	133.4 N
Y-axis - Continuous Current	1.6 Arms	1.6 Arms
Y-axis - Instantaneous Current	8 Arms	8 Arms
Y-axis linear resistor	8.3 ohms	8.3 ohms
Y-axis linear inductance	1.8 mH	1.8 mH
Y-axis - Electrical Time Constant	0.21ms	0.21ms
Y-axis - Back EMF constant	13.9 V/(m/s)	13.9 V/(m/s)
Y-axis - Optical ruler category	Increment, analogy (20 nm)	Increment, analogy (20 nm)
Z-axis_load	10 kg	10 kg
Z-axis travel	60 mm	60 mm
Z-axis positioning accuracy/rotation accuracy	± 0.3 µm	± 0.3 µm
Z-axis repeatability	± 0.15 µm	± 0.15 µm
Z-axis_XY orthogonal	--	--
Z-axis and YZ orthogonal	15 are-sec	15 are-sec
Z-axis - Continuous Thrust	26.7 N	26.7 N
Z-axis_Instantaneous Thrust	133.4 N	133.4 N
Z-axis - Continuous Current	1.6 Arms	1.6 Arms
Z-axis_instantaneous current	8 Arms	8 Arms
Z-axis linear resistance	8.3 ohms	8.3 ohms
Z-axis linear inductance	1.8 mH	1.8 mH
Z-axis - Electrical Time Constant	0.21ms	0.21ms
Z-axis - Back EMF constant	13.9 V/(m/s)	13.9 V/(m/s)
Z-axis - Optical scale category	Increment, analogy (20 nm)	Increment, analogy (20 nm)

Model

GNTXYZ-100-100-60

GNTXYZ-160-160-60