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M5E-2000B-R

M5E-2000B-R

Composed of an XYZ three-axis precision positioning stage module, and a tilting stage module forming a five-axis composite function precision stage group, suitable for single-core alignment.

Individually disassembled module selection model - M5E-2000B-R - [XYZ module - MXYZ60-ACSR, tilt stage module - MTR60-45R]

  • Specifications
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Total of 1 models
Model M5E-2000B-R
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X-axis travel (mm) coarse adjustment ± 6.5
X-axis travel (mm) fine-tuning ± 0.3
X-axis - Accuracy (µm) - Coarse Adjustment 10
X-axis - Accuracy (µm) - Fine-tuning 0.5
Y-axis travel (mm) coarse adjustment ± 6.5
Y-axis travel (mm) fine-tuning ± 0.3
Y-axis - Accuracy (µm) - Coarse Adjustment 10
Y-axis - Accuracy (µm) - Fine-tuning 0.5
Z-axis travel (mm) coarse adjustment ± 6.5
Z-axis travel (mm) fine-tuning ± 0.3
Z-axis - Accuracy (µm) - Coarse Adjustment 10
Z-axis - Accuracy (µm) - Fine-tuning 0.5
θx_stroke (mm)_coarse adjustment ± 3 °
θx_stroke (mm)_fine-tuning ± 3 °
θx_precision (µm)_coarse adjustment ≒ 29.3" / scale
θx_precision (µm)_fine-tuning ≒ 29.3" / scale
θy_stroke (mm)_coarse adjustment ± 3 °
θy_stroke (mm)_fine-tuning ± 3 °
θy_ Precision (µm)_ Coarse Adjustment ≒ 27.8" / scale
θy_ Precision (µm)_ Fine-tuning ≒ 27.8" / scale
Electrical specifications
Stepper Motor/Driver Specifications Comparison Table
Electric slide table and connecting cable
Introduction to Electromagnetic Brake Stepper Motors
Introduction to Feedback Stepper Motors
Linear sliding table detection method (X, Y, Z axes)
Rotary slide detection method (θ axis)

Model

M5E-2000B-R
Specifications
X-axis travel (mm) coarse adjustment
X-axis travel (mm) fine-tuning
X-axis - Accuracy (µm) - Coarse Adjustment
X-axis - Accuracy (µm) - Fine-tuning
Y-axis travel (mm) coarse adjustment
Y-axis travel (mm) fine-tuning
Y-axis - Accuracy (µm) - Coarse Adjustment
Y-axis - Accuracy (µm) - Fine-tuning
Z-axis travel (mm) coarse adjustment
Z-axis travel (mm) fine-tuning
Z-axis - Accuracy (µm) - Coarse Adjustment
Z-axis - Accuracy (µm) - Fine-tuning
θx_stroke (mm)_coarse adjustment
θx_stroke (mm)_fine-tuning
θx_precision (µm)_coarse adjustment
θx_precision (µm)_fine-tuning
θy_stroke (mm)_coarse adjustment
θy_stroke (mm)_fine-tuning
θy_ Precision (µm)_ Coarse Adjustment
θy_ Precision (µm)_ Fine-tuning