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Precision Motorized Stages

AXYR60 - Precision

AXYR60 - Precision

3-axis-in-one design:High rigidity, Low energy consumption, Wide applications, Simple operation

Low profile, High moment rigidity

Patent:Integrated rotation angle to resolve limited moving stroke problems

Applied in small size panel production verification test, mobile phone and electronics industry etc

Model Shown: AXYR60-A2PR-ND

  • Specifications
  • Technical Data
  • Image Download
Total of 4 models
Model AXYR60-A2PR-ND AXYR60-A2PL-ND AXYR60-A2UPR-CD AXYR60-A2UPL-CD
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Table Size (mm) Ø 60 Ø 60 Ø 60 Ø 60
Travel distance X-axis (mm) ± 7.5 ± 7.5 ± 7.5 ± 7.5
Travel distance along the Y-axis (mm) ± 7.5 ± 7.5 ± 7.5 ± 7.5
Travel distance θ axis (°) ± 8.5 ± 8.5 ± 8.5 ± 8.5
Drive Type Screw drive Screw drive Screw drive Screw drive
Rail XY axis Cross roller guide Cross roller guide Cross roller guide Cross roller guide
orbit θ axis Crossed roller bearings Crossed roller bearings Crossed roller bearings Crossed roller bearings
Stage Material Aluminum Alloy Aluminum Alloy Aluminum Alloy Aluminum Alloy
Surface Treatment Black anodized Black anodized Black anodized Black anodized
Accuracy Level P: Precision type P: Precision type UP: Ultra-precision type UP: Ultra-precision type
Outgoing cable type (connector type) R: Right-side installation L: Left side installation R: Right-side installation L: Left side installation
XY Axis Resolution(Pulse) (µm) 5 (Full) / 2.5 (Half) 5 (Full) / 2.5 (Half) 2 (Full) / 1 (Half) 2 (Full) / 1 (Half)
θ-axis resolution (pulse) (°) 0.0056 (Full) / 0.0028 (Half) 0.0056 (Full) / 0.0028 (Half) 0.0022 (Full) / 0.0011 (Half) 0.0022 (Full) / 0.0011 (Half)
Maximum speed of XY axes (full step) (mm/sec) 10 10 5 5
Maximum velocity along the θ axis (full step) (°/sec) 8 8 8 8
XY axis unidirectional positioning accuracy (µm) 10 10 5 5
XY axis repeatability (µm) ± 1 ± 1 ± 0.5 ± 0.5
θ-axis unidirectional positioning accuracy (°) 0.05 0.05 0.03 0.03
θ-axis repeatability accuracy (°) ± 0.01 ± 0.01 ± 0.003 ± 0.003
Load Capacity (Kgf) 6 6 6 6
XY axis free spin (µm) 2 2 1 1
θ-axis rotation (°) 0.01 0.01 0.003 0.003
Parallelism (µm) 20 20 20 20
Dynamic Straightness (µm) 20 20 20 20
Dynamic Parallelism (µm) 10 10 10 10
Motor type 2MS-N28D32A 2MS-N28D32A SH5281-7211 SH5281-7211
Motor Brand GMT GMT SANYO SANYO
Connector_Stage Side Connector 15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS 15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS 15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS 15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS
Connector_Controller Side Connector 15-pin female connector D-SUB / 12-pin female connector HRS (optional) 15-pin female connector D-SUB / 12-pin female connector HRS (optional) 15-pin female connector D-SUB / 12-pin female connector HRS (optional) 15-pin female connector D-SUB / 12-pin female connector HRS (optional)
Sensor_Power Voltage 24V ± 10% 24V ± 10% 24V ± 10% 24V ± 10%
Sensor_Control Output NPN open collector output under 24V 8mA NPN open collector output under 24V 8mA NPN open collector output under 24V 8mA NPN open collector output under 24V 8mA
Sensor_Output Control Detection (during sensing): Output transistor OFF (non-conducting) Detection (during sensing): Output transistor OFF (non-conducting) Detection (during sensing): Output transistor OFF (non-conducting) Detection (during sensing): Output transistor OFF (non-conducting)
Product Overview

System Configuration Diagram

♦   For selection of the drivers preferred, please refer to the reference table or the catalogue of MotorDriver.

♦  All of the drivers chosed are the specification of GMT preferred. For different needs, please choose the suitable drivers according to real functional needs. 



Axis Definition

GMT has defined different axis as the following figuration according to the movement direction:

Horizontal movement direction is X and Y axis.

Vertical movement direction is Z axis.

Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis.

Green arrows present the specified axis movement direction.

 

Motor•driver  Reference Table

 

Electrical specifications
Stepper Motor/Driver Specifications Comparison Table
Electric slide table and connecting cable
Introduction to Electromagnetic Brake Stepper Motors
Introduction to Feedback Stepper Motors
Linear sliding table detection method (X, Y axis)
Rotary slide detection method (θ axis)

Model

AXYR60-A2PR-ND
AXYR60-A2UPR-CD
Specifications
Table Size (mm)
Travel distance X-axis (mm)
Travel distance along the Y-axis (mm)
Travel distance θ axis (°)
Drive Type
Rail XY axis
orbit θ axis
Stage Material
Surface Treatment
Accuracy Level
Outgoing cable type (connector type)
XY Axis Resolution(Pulse) (µm)
θ-axis resolution (pulse) (°)
Maximum speed of XY axes (full step) (mm/sec)
Maximum velocity along the θ axis (full step) (°/sec)
XY axis unidirectional positioning accuracy (µm)
XY axis repeatability (µm)
θ-axis unidirectional positioning accuracy (°)
θ-axis repeatability accuracy (°)
Load Capacity (Kgf)
XY axis free spin (µm)
θ-axis rotation (°)
Parallelism (µm)
Dynamic Straightness (µm)
Dynamic Parallelism (µm)
Motor type
Motor Brand
Connector_Stage Side Connector
Connector_Controller Side Connector
Sensor_Power Voltage
Sensor_Control Output
Sensor_Output Control