Catalog
Inquiry
Contact
Products

GPZ- S100. XYZ

GPZ- S100. XYZ
★Piezoelectric Ceramic Stack Actuation
★Frictionless Flexure Construction
★Built-in Capacitive Sensors, Closed-loop Control
★Nanometer-level Positioning Resolution
  • Specifications
  • Technical Data
  • Image Download
產品概述

Updated: May 11, 2026

Specification Sheet 

Operating Environment

Ambient Temperature (Vacuum Optional)

Dimensions(mm)

35*35*42

Materials

Stainless Steel

Travel Range(mm)

100

Linearity Error(%)

0.02

Repeatability(nm)

5

Resolution(Closed-loop)(nm)

0.5

Resolution(Open-loop)(nm)

0.2

Stiffness(N/μm )

0.6

Resonant Frequency(Hz)(Unloaded, ±20%)

X:490 / Y:480 / Z:350

Resonant Frequency(Hz)(0.5 kg Load, ±20%)

X:110 / Y:115 / Z:170

Max. Load Capacity(g)

500

Sensor Type

Capacitive Position Sensor

Cable & Connector

D-Sub 7W2

Controller Series

MC-Archimedes.N Series

 

 

Model

3ND2-S-100-XYZ-15-T1