Products
GPZ-Free6D.3-2.150
★Urtra silent operation
★Self-locking at power-off
★Built-in high precision position optical sensor
★Nanometer-level Positioning Resolution
★Parallel-Drive Structure
★High-Rigidity System
★Self-locking at power-off
★Built-in high precision position optical sensor
★Nanometer-level Positioning Resolution
★Parallel-Drive Structure
★High-Rigidity System
- Specifications
- Technical Data
- Image Download
產品概述
Updated: May 11, 2026
Specification Sheet
|
Working Environment |
Ambient Temperature |
|
Dimension(mm) |
Ø150*90 |
|
Material |
Aluminum |
|
Max. Vertical Load(kg) |
1 |
|
Inner Diameter(mm) |
Ø40 |
|
Traveling Stroke X,Y,Z(mm) |
± 10,± 10,± 5 |
|
Traveling Stroke θX,θY ,Θz( ° ) |
± 9,± 8,± 14 |
|
Repeatability Precision X,Y,Z(μm) |
± 0.15,± 0.15,± 0.1 |
|
Repeatability Precision θX,θY,θZ(μrad) |
± 5,± 5 ,± 5 |
|
Min. Step伐 X,Y,Z(nm) |
10,10,10 |
|
Min. Step θX,θY,θZ(μrad) |
1,1,1 |
|
Sensors |
Optical Encoder |
|
Resolution(nm) |
2 |
|
Cable & Connector |
D-Sub15 |
|
Controller Spec |
MC-Free6D |
