Update:2023.03.28
Model No.
EXYR80-A2PR-ND
EXYR80-A2PL-ND
Mechanical Spec.
Table Size (mm)
Ø 80
XY-Axis Travel Stroke (mm)
± 12
θ-Axis Travel Stroke (°)
± 10
Drive Type
Ball screw
XY-Axis Rail
Crossed-roller Guiding
θ-Axis Rail
Crossed-roller Bearing
Stage Material / Surface Treatment
Aluminum Alloy / Black anodized
Accuracy Level
Precision grade
Motor Direction
Right Wiring
Left Wiring
Precision Spec.
XY-Axis Resolution (Pulse) (µm)
5 (Full) / 2.5 (Half)
XY-Axis Max. Speed (Full Step) (mm/sec)
10
XY-Axis Positioning Precision (µm)
XY-Axis Repeatability Precision (µm)
± 1
XY-Axis Missed Step (µm)
2
θ-Axis Resolution (Pulse) (°)
0.0047 (Full) / 0.0023 (Half)
θ-Axis Max. Speed (Full Step) (°/sec)
8
θ-Axis Positioning Precision (°)
0.05
θ-Axis Repeatability Precision (°)
± 0.01
θ-Axis Missed Step (°)
0.01
Parallelism (µm)
30
Dynamic Straightness (µm)
20
Dynamic Parallelism (µm)
15
Load Capacity (Kgf)
Electrical Spec.
Motor Type
2MS-N28D45A
Motor Brand
GMT
Stage Side Connector
15-Pin male end connetor D-SUB / 12-Pin male end connetor HRS
Controller Side Connector
15-Pin female end connetor D-SUB / 12-Pin female end connetor HRS (Additional options)
Power Voltage
24V ± 10%
Control Output
NPN open collector output under 24V 8mA
Output Control
Testing (sensing):output transistor OFF (closed)
♦ For selection of the drivers preferred, please refer to the reference table or the catalogue of Motor・Driver.
♦ All of the drivers chosed are the specification of GMT preferred. For different needs, please choose the suitable drivers according to real functional needs.
GMT has defined different axis as the following figuration according to the movement direction:
Horizontal movement direction is X and Y axis.
Vertical movement direction is Z axis.
Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis.
Green arrows present the specified axis movement direction.