Update:2022.7.21
Model No.
M6E-2200B-R
Specification
Axis
X
Y
Z
θx
θy
θz
Travel Stroke
Rough Tuning
± 6.5 mm
± 3 °
± 4 °
Fine Tuning
± 0.3 mm
Accuracy
10 μm
≒ 29.3" / Vernier
≒ 27.8" / Vernier
≒ 33" / Vernier
0.5 μm