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AZ7010 Series - Ultra Precision


★ Guide-Crossed-roller Guide, In structure, V-groove and crossed roller acquire movement in high accuracy and capacity by linear transmission to act a high precision movement and load capacity performance.
★ Transmission Parts-Ball screw, It transmits through the ball involving in the locknut and screw to reach the accuracy and longer operation lifetime.
★ Material-Aluminum Alloy, Stainless Steel

 Update:2021.03.02

Model No. AZ7010-A6OPR AZ7010-S6OPR
Table Size 70X70 mm
Travel Stroke  10 mm
Drive Type Ball screw Ø8  lead 1mm
Rail Crossed-roller guiding
Moment rigidity Pitch 0.15/Yaw 0.05/Yaw 0.12("/N-cm)
Resolution (Pulse)

M:0.25μm/1.25μm 

J:0.5μm/2.5μm

Maximum Speed (Full Step) 5 mm / sec
Positioning Precision 5 μm 
Repeatability Precision ±0.5 μm
Load Capacity 8 Kgf  10 Kgf 
Missed Step 1 μm
Parallelism 20 μm

 

 

Multi-point repeated positioning accuracy

♦   Accuracy measurement description

1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual
The difference between the movement value and the target movement value, and the maximum error value is taken. This value is the unidirectional positioning accuracy.
2. Multi-point repeated positioning accuracy: within the range of the predetermined detection stroke, when the mechanical program is executed, the position accuracy obtained by repeatedly running the same program code
degree. Calculate the position deviation that occurs when the same position is repeated back and forth, and obtain the deviation value between the two.

♦   Precision introduction

1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process.
2. The detection of GMT high-end precision linear slide module series adopts multi-point repeated measurement, that is, multi-point quantity measurement within a fixed stroke range (points
The amount is increased or decreased according to the length of the stroke), and the actual change of the round-trip position error is recorded, in pursuit of high precision and repeatability.
3. Through the non-contact laser interferometer measurement, to ensure that the unidirectional positioning is within 10μm, and the multipoint repetitive positioning accuracy is within 1.5μm. If there is a need for higher precision and precision, please contact the regional sales/business team.

 

Definition of pitch, roll, and roll

♦   The "Allowable Moment Load" and "Moment Rigidity" in the specifications are digitized into the components shown in the figure below. Please refer to the corresponding ingredients according to the conditions of use.

 

Axis Definition

GMT has defined different axis as the following figuration according to the movement direction:

Horizontal movement direction is X and Y axis.

Vertical movement direction is Z axis.

Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis.

Green arrows present the specified axis movement direction.

 

Motor/driver

 

 

 Update:2021.03.02

Model No. AZ7010-A6OPR AZ7010-S6OPR
Table Size 70X70 mm
Travel Stroke  10 mm
Drive Type Ball screw Ø8  lead 1mm
Rail Crossed-roller guiding
Moment rigidity Pitch 0.15/Yaw 0.05/Yaw 0.12("/N-cm)
Resolution (Pulse)

M:0.25μm/1.25μm 

J:0.5μm/2.5μm

Maximum Speed (Full Step) 5 mm / sec
Positioning Precision 5 μm 
Repeatability Precision ±0.5 μm
Load Capacity 8 Kgf  10 Kgf 
Missed Step 1 μm
Parallelism 20 μm

 

 

Multi-point repeated positioning accuracy

♦   Accuracy measurement description

1. Unidirectional positioning accuracy: within the range of the predetermined detection stroke, starting from a starting position, moving and positioning in a certain direction sequentially, and detecting the actual
The difference between the movement value and the target movement value, and the maximum error value is taken. This value is the unidirectional positioning accuracy.
2. Multi-point repeated positioning accuracy: within the range of the predetermined detection stroke, when the mechanical program is executed, the position accuracy obtained by repeatedly running the same program code
degree. Calculate the position deviation that occurs when the same position is repeated back and forth, and obtain the deviation value between the two.

♦   Precision introduction

1. Design the GMT high-level precision inspection method to meet the precision requirements of fiber coupling and semiconductor manufacturing process.
2. The detection of GMT high-end precision linear slide module series adopts multi-point repeated measurement, that is, multi-point quantity measurement within a fixed stroke range (points
The amount is increased or decreased according to the length of the stroke), and the actual change of the round-trip position error is recorded, in pursuit of high precision and repeatability.
3. Through the non-contact laser interferometer measurement, to ensure that the unidirectional positioning is within 10μm, and the multipoint repetitive positioning accuracy is within 1.5μm. If there is a need for higher precision and precision, please contact the regional sales/business team.

 

Definition of pitch, roll, and roll

♦   The "Allowable Moment Load" and "Moment Rigidity" in the specifications are digitized into the components shown in the figure below. Please refer to the corresponding ingredients according to the conditions of use.

 

Axis Definition

GMT has defined different axis as the following figuration according to the movement direction:

Horizontal movement direction is X and Y axis.

Vertical movement direction is Z axis.

Movement around X, Y, Z axis is defined to α axis, β axis, and θ axis.

Green arrows present the specified axis movement direction.

 

Motor/driver

 

 

Products specifications
Model No. AZ7010-OP
Type Ultra Precision
Axis Z Axis
Material Stainless Steel
Guide device Crossed roller leading
Transmission Parts Ball Screw